Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
NAKAGAWA Yukito and WANI Etsuo and SATO Hisaaki and SAMUKAWA Seiji and TSUKADA Tsutomu,Ultra High Frequency Plasma Source Using Multi-Window Type Antenna.,Shinku,05598516,The Vacuum Society of Japan,1998,41,3,307-310,https://cir.nii.ac.jp/crid/1390282679040184320,https://doi.org/10.3131/jvsj.41.307