Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
SHIBATA Kenji and INOUE Tomoyasu and TAKIGAWA Tadahiro,CW Electron Beam Annealing with a Modified SEM,Shinku,05598516,The Vacuum Society of Japan,1982,25,6,428-438,https://cir.nii.ac.jp/crid/1390282679040227584,https://doi.org/10.3131/jvsj.25.428