Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) KAMADA Shin and SAWADA Tadashi and SUGIYAMA Wataru and FUJIOKA Manabu and TSUCHIYA Masaru,Relationship between Compression Process and the Ultimate Pressure of a Scroll Vacuum Pump.,Shinku,05598516,The Vacuum Society of Japan,2001,44,3,163-166,https://cir.nii.ac.jp/crid/1390282679040983552,https://doi.org/10.3131/jvsj.44.163