Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) IGUCHI Masashi and NAGAKUBO Masao and HASHIMOTO Shoichi and KANETO Shigeru and OIKAWA Hisashi,Development of New Type Molecular Pump (I),Shinku,05598516,The Vacuum Society of Japan,1984,27,5,422-424,https://cir.nii.ac.jp/crid/1390282679041378048,https://doi.org/10.3131/jvsj.27.422