Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) SATO Yosuke and NISHIGUCHI Tetsuya and NONAKA Hidehiko and ICHIMURA Shingo and NIHEI Yoshimasa,Development of Local and Real-time Concentration Measuring Method for Ozone Gas,Shinku,05598516,The Vacuum Society of Japan,2005,48,6,378-381,https://cir.nii.ac.jp/crid/1390282679041910784,https://doi.org/10.3131/jvsj.48.378