Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
KOBAYASHI Eiichi and NAMBU Akira and KAKIUCHI Takuhiro and MASE Kazuhiko,Silicon Single Crystal Wafer Holder with a Cold Trap and a Direct Current Heating Mechanism Mounted on a Conflat Flange with an Outer Diameter of 70 mm,Shinku,05598516,The Vacuum Society of Japan,2007,50,1,57-59,https://cir.nii.ac.jp/crid/1390282679042056064,https://doi.org/10.3131/jvsj.50.57