Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
KIYOTA Tetsuji,Application of Gases to Surface Finishing Technologies. Effects of the Gases in Sputtering Processes.,Journal of The Surface Finishing Society of Japan,09151869,The Surface Finishing Society of Japan,1998,49,6,542-546,https://cir.nii.ac.jp/crid/1390282679090350080,https://doi.org/10.4139/sfj.49.542