Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
TAKAYA Matsufumi and MATSUNAGA Masahisa,"Preparation of (Ti,Al)N films by reactive binary sputtering.",Journal of The Surface Finishing Society of Japan,09151869,The Surface Finishing Society of Japan,1990,41,5,530-533,https://cir.nii.ac.jp/crid/1390282679090899456,https://doi.org/10.4139/sfj.41.530