Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
MORITA Hiroshi,"Clean Technology Supporting Semiconductor Manufacturing Process. Ultrapure Water. Production, Analysis and Functional Water.",Journal of The Surface Finishing Society of Japan,09151869,The Surface Finishing Society of Japan,1999,50,10,873-878,https://cir.nii.ac.jp/crid/1390282679091457920,https://doi.org/10.4139/sfj.50.873