Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
FUJITA Hiroyuki,Making Three-Dimensional Micromachines. Fabrication Technologies for High-Aspect-Ratio Microstructure.,Journal of The Surface Finishing Society of Japan,09151869,The Surface Finishing Society of Japan,1998,49,8,844-848,https://cir.nii.ac.jp/crid/1390282679091907584,https://doi.org/10.4139/sfj.49.844