Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
UENO Kazuyoshi,Vacuum Equipment and Application for Thin Film in the Multimedia. ULSI Interconnect Technology Trend.,Journal of The Surface Finishing Society of Japan,09151869,The Surface Finishing Society of Japan,1997,48,11,1050-1053,https://cir.nii.ac.jp/crid/1390282679092616192,https://doi.org/10.4139/sfj.48.1050