Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Konishi Shinya and Moriyama Miki and Murakami Masanori,Effect of Annealing Atmosphere on Void Formation in Copper Interconnects,MATERIALS TRANSACTIONS,13459678,The Japan Institute of Metals and Materials,2002,43,7,1624-1628,https://cir.nii.ac.jp/crid/1390282679223561472,https://doi.org/10.2320/matertrans.43.1624