著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) Komiyama Shoko and Sutou Yuji and Koike Junichi,Effect of Heat Treatment on the Hardness of Ti-Mo-N Films Deposited by RF Reactive Magnetron Sputtering,MATERIALS TRANSACTIONS,13459678,公益社団法人 日本金属学会,2010,51,8,1467-1473,https://cir.nii.ac.jp/crid/1390282679227292672,https://doi.org/10.2320/matertrans.m2010119