著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Thakerlay James W. and Nassar Roger A. and Spear-Alfonso Kathleen and Brainard Robert and Goldfarb Dario and Wallow Thomas and Wei Yayi and Montgomery Warren and Petrillo Karen and Wood Robert and Koay Chief-seng and Mackey Jeff and Naulleau Patrick and Pierson Bill and Solak Harun H.,Pathway to sub-30nm Resolution in EUV Lithography,Journal of Photopolymer Science and Technology,09149244,フォトポリマー学会,2007,20,3,411-418,https://cir.nii.ac.jp/crid/1390282679300482304,https://doi.org/10.2494/photopolymer.20.411