著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Kobayashi Shinji and Toriumi Minoru and Santillan Julious Joseph,Analysis of Outgassing from EUV Resists,Journal of Photopolymer Science and Technology,09149244,フォトポリマー学会,2007,20,3,445-451,https://cir.nii.ac.jp/crid/1390282679300506240,https://doi.org/10.2494/photopolymer.20.445