著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) Miller Harris R. and Johnson Donald W. and Mori Satoshi,KMPR Photoresist Process Optimization Using Factorial Experimental Design,Journal of Photopolymer Science and Technology,09149244,フォトポリマー学会,2004,17,5,677-684,https://cir.nii.ac.jp/crid/1390282679300522496,https://doi.org/10.2494/photopolymer.17.677