著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Tanabe Toshiaki and Nishihata Masaaki and Kawata Hiroyuki and Hirai Yoshihiko,Simulation of the Time Evolution Profiles in Nanoimprint Lithography,Journal of Photopolymer Science and Technology,09149244,フォトポリマー学会,2007,20,4,573-576,https://cir.nii.ac.jp/crid/1390282679300538880,https://doi.org/10.2494/photopolymer.20.573