Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Seguchi Atsushi and Kono Yoshiyuki and Oda Fumihiko and Morimoto Yukihiro,Techniques for Measuring Rate Constants for Acid Generation from PAG (Photo Acid Generator) during ArF Exposure,Journal of Photopolymer Science and Technology,09149244,The Society of Photopolymer Science and Technology(SPST),2008,21,1,69-73,https://cir.nii.ac.jp/crid/1390282679300625536,https://doi.org/10.2494/photopolymer.21.69