Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Ko Tsung-Han and Lo Kuan-Hsin and Wu Chieh-Han and Chang Ching-Yu and Lee Chung-Ju and Lin John,Defectivity Study for Directed Self-Assembly (DSA) Contact Hole Shrink,Journal of Photopolymer Science and Technology,09149244,The Society of Photopolymer Science and Technology(SPST),2016,29,6,793-796,https://cir.nii.ac.jp/crid/1390282679301073536,https://doi.org/10.2494/photopolymer.29.793