Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Yoshihisa Sensu and Atsushi Sekiguchi and Yoshiyuki Kondo and Satoshi Mori and Nao Honda and William D. Weber,Profile Simulation of SU-8 Thick Film Resist,Journal of Photopolymer Science and Technology,09149244,The Society of Photopolymer Science and Technology(SPST),2005,18,1,125-132,https://cir.nii.ac.jp/crid/1390282679301133056,https://doi.org/10.2494/photopolymer.18.125