Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Morita Hiroshi,Lithography Process Simulations using OCTA -Application to Development and DSA,Journal of Photopolymer Science and Technology,09149244,The Society of Photopolymer Science and Technology(SPST),2014,27,1,25-29,https://cir.nii.ac.jp/crid/1390282679301543040,https://doi.org/10.2494/photopolymer.27.25