Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Tamai Toshiyuki and Matsukawa Kimihiro and Matsuura Yukihito and Inoue Hiroshi and Toyota Hiroshi and Satoh Kazuo and Fukuda Hiroki,Acryl Polymer-Silica Hybrid for Electron Beam Resist.,Journal of Photopolymer Science and Technology,09149244,The Society of Photopolymer Science and Technology(SPST),2002,15,1,19-22,https://cir.nii.ac.jp/crid/1390282679301707648,https://doi.org/10.2494/photopolymer.15.19