著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Tsubaki Hideaki and Nihashi Wataru and Tsuchihashi Toru and Nishiyama Fumiyuki,Negative-tone Imaging with EUV Exposure toward 13 nm hp,Journal of Photopolymer Science and Technology,09149244,フォトポリマー学会,2016,29,3,479-487,https://cir.nii.ac.jp/crid/1390282679301835776,https://doi.org/10.2494/photopolymer.29.479