著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Kato Hirokazu and Seino Yuriko and Yonemitsu Hiroki and Sato Hironobu and Kanno Masahiro and Kobayashi Katsutoshi and Kawanishi Ayako and Imamura Tsubasa and Omura Mitsuhiro and Nakamura Naofumi and Azuma Tsukasa,Electrical Via Chain Yield for DSA Contact Hole Shrink Process,Journal of Photopolymer Science and Technology,09149244,フォトポリマー学会,2013,26,1,21-26,https://cir.nii.ac.jp/crid/1390282679302176128,https://doi.org/10.2494/photopolymer.26.21