著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Kozawa Takahiro and Yamamoto Hiroki and Tagawa Seiichi,Effect of Inhomogeneous Acid Distribution on Line Edge Roughness-Relationship to Line Edge Roughness Originating from Chemical Gradient,Journal of Photopolymer Science and Technology,09149244,フォトポリマー学会,2010,23,5,625-630,https://cir.nii.ac.jp/crid/1390282679302384896,https://doi.org/10.2494/photopolymer.23.625