著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Neisser Mark and Jen Shih-Hui and Chun Jun Sung and Antohe Alin and He Long and Kearney Patrick and Goodwin Frank,EUV Research Activity at SEMATECH,Journal of Photopolymer Science and Technology,09149244,フォトポリマー学会,2014,27,5,595-600,https://cir.nii.ac.jp/crid/1390282679302456832,https://doi.org/10.2494/photopolymer.27.595