Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Tarutani Shinji and Nihashi Wataru and Hirano Shuuji and Yokokawa Natsumi and Takizawa Hiroo,Negative Tone Imaging Process and Materials for EUV Lithography,Journal of Photopolymer Science and Technology,09149244,The Society of Photopolymer Science and Technology(SPST),2013,26,5,599-604,https://cir.nii.ac.jp/crid/1390282679302615936,https://doi.org/10.2494/photopolymer.26.599