Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
SUWA Yoshihide and FUJII Shuji and YAMADA Yoko and YAMASHITA Rie and MIN Taehong and HAYASHI Takao and MATSUBA Katsumi,Countermeasure to the Airflow Fluctuation and the Contamination in Clean Stockers Used for Large-Scaled Glass Substrates,Earozoru Kenkyu,09122834,Japan Association of Aerosol Science and Technology,2011,26,1,47-56,https://cir.nii.ac.jp/crid/1390282679318514944,https://doi.org/10.11203/jar.26.47