Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) NAKAJIMA Hiroyuki and HONDA Shigeo,Removal Efficiency for Organic Compounds in Cleanroom Air by Air Washer at LCD Manufacturing Factory,Earozoru Kenkyu,09122834,Japan Association of Aerosol Science and Technology,2002,17,2,89-95,https://cir.nii.ac.jp/crid/1390282679320286208,https://doi.org/10.11203/jar.17.89