Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
HAYASHI Toshiyuki and MATSUMURO Akihito and WATANABE Tomohiko and MORI Toshihiko and TAKAHASHI Yutaka and YAMAGUCHI Katsumi,Consideration of Deformation of TiN Thin Films with Preferred Orientation Prepared by lon-beam-assisted Deposition.,TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A,13447912,The Japan Society of Mechanical Engineers,1999,65,636,1818-1823,https://cir.nii.ac.jp/crid/1390282679424934656,https://doi.org/10.1299/kikaia.65.1818