Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Itoh Takaki,Glow Discharge Mass Spectroscopy Study of Ion Concentrations of Joints in Anodic Bonding of Borosilicate Glass to Ultrathin Silicon,IEEJ Transactions on Sensors and Micromachines,13418939,The Institute of Electrical Engineers of Japan,2016,136,11,478-481,https://cir.nii.ac.jp/crid/1390282679437080704,https://doi.org/10.1541/ieejsmas.136.478