Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Ueki Shinji and Nishimori Yuki and Imamoto Hiroshi and Kubota Tomohiro and Sugiyama Masakazu and Samukawa Seiji and Hashiguchi Gen,Analysis of a Comb-Drive Actuator Taking the Depletion Layer into Consideration,IEEJ Transactions on Sensors and Micromachines,13418939,The Institute of Electrical Engineers of Japan,2010,130,8,388-393,https://cir.nii.ac.jp/crid/1390282679437722496,https://doi.org/10.1541/ieejsmas.130.388