Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Hirano Hideki and Rasly Mahmoud and Kaushik Neelam and Esashi Masayoshi and Tanaka Shuji,Particle Removal without Causing Damage to MEMS Structure,IEEJ Transactions on Sensors and Micromachines,13418939,The Institute of Electrical Engineers of Japan,2013,133,5,157-163,https://cir.nii.ac.jp/crid/1390282679437798784,https://doi.org/10.1541/ieejsmas.133.157