Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Liang Jinxing and Kohsaka Fusao and Matsuo Takahiro and Ueda Toshitsugu,Wet Etched High Aspect Ratio Microstructures on Quartz for MEMS Applications,IEEJ Transactions on Sensors and Micromachines,13418939,The Institute of Electrical Engineers of Japan,2007,127,7,337-342,https://cir.nii.ac.jp/crid/1390282679438007936,https://doi.org/10.1541/ieejsmas.127.337