Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Rooij N. F. de,EXAMPLES OF SILICON BASED MICROSYSTEMS,IEEJ Transactions on Sensors and Micromachines,13418939,The Institute of Electrical Engineers of Japan,1995,115,1,7-9,https://cir.nii.ac.jp/crid/1390282679438310144,https://doi.org/10.1541/ieejsmas.115.7