Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) LICHT Torben R. and SCHEEPER Patrick R.,Historical Perspective of Accelerometer Technologies,IEEJ Transactions on Sensors and Micromachines,13418939,The Institute of Electrical Engineers of Japan,1996,116,7,256-267,https://cir.nii.ac.jp/crid/1390282679438379392,https://doi.org/10.1541/ieejsmas.116.256