著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Inoue Daisuke and Oohira Fumikazu and Yamamoto Kazuya and Kondo Masahiro and Harada Takaki and Ishimaru Ichirou and Hashiguchi Gen and Hosogi Maho,Application of Vertical Comb-Drive MEMS Mirror for a Phase Shift Device,電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）,13418939,一般社団法人 電気学会,2008,128,6,261-265,https://cir.nii.ac.jp/crid/1390282679438502272,https://doi.org/10.1541/ieejsmas.128.261