Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Hara Hitoshi and Kishi Naoki and Iwaoka Hideto,Development of Micro-spectrum Analyzing Devices: Applications to Carbon Dioxide Sensor,IEEJ Transactions on Sensors and Micromachines,13418939,The Institute of Electrical Engineers of Japan,2002,122,5,274-279,https://cir.nii.ac.jp/crid/1390282679438612992,https://doi.org/10.1541/ieejsmas.122.274