Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Itoh Takaki and Nakaie Toshiyuki,Evaluation of a Short Microelectromechanical System Process Using a Silicon-on-Insulator Diaphragm and Anodic Bonding,IEEJ Transactions on Sensors and Micromachines,13418939,The Institute of Electrical Engineers of Japan,2017,137,9,257-261,https://cir.nii.ac.jp/crid/1390282679438948480,https://doi.org/10.1541/ieejsmas.137.257