Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Toshiyoshi Hiroshi,Silicon Oxide Sacrificial Etching Technology,IEEJ Transactions on Sensors and Micromachines,13418939,The Institute of Electrical Engineers of Japan,2011,131,1,8-13,https://cir.nii.ac.jp/crid/1390282679439076864,https://doi.org/10.1541/ieejsmas.131.8