Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Matsumura Takeshi and Tokuda Takayuki and Tsutinaga Akinobu and Kimata Masafumi and Abe Hideyuki and Tokashiki Naotaka,Vacuum-Packaging Technology for IRFPAs,IEEJ Transactions on Sensors and Micromachines,13418939,The Institute of Electrical Engineers of Japan,2010,130,6,212-218,https://cir.nii.ac.jp/crid/1390282679439370496,https://doi.org/10.1541/ieejsmas.130.212