著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Tajima H. and Shiobara N. and Katsumata H. and Uekusa S.,Properties of TaN Films for ULSIs Prepared by Reactive Sputter Deposition,Journal of Surface Analysis,13411756,一般社団法人 表面分析研究会,2011,17,3,247-251,https://cir.nii.ac.jp/crid/1390282679448014080,https://doi.org/10.1384/jsa.17.247