Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Matsumura Sumihiro,Effect of Incidence Angle of Ions Caused by Inaccuracy of Stage Tilt Angle and Stage Rotation Angle on Sputter Depth Profiling Analysis,Journal of Surface Analysis,13411756,The Surface Analysis Society of Japan,2015,22,2,110-117,https://cir.nii.ac.jp/crid/1390282679448342272,https://doi.org/10.1384/jsa.22.110