Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) KISHIMOTO Yoshinao and AMAYA Kenji,Estimation Method of Copper Electroplating Current Density Distribution Using Measurement Data of Electric Potentials in Plating Bath,TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A,03875008,The Japan Society of Mechanical Engineers,2008,74,745,1204-1211,https://cir.nii.ac.jp/crid/1390282679454579072,https://doi.org/10.1299/kikaia.74.1204