Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Kim Hee Joon and Egashira Yasuyuki and Komiyama Hiroshi,Determination of Surface Reaction Rate Constant by Using Micro-Trench Method in APCVD.,KAGAKU KOGAKU RONBUNSHU,0386216X,"The Society of Chemical Engineers, Japan",1991,17,6,1175-1178,https://cir.nii.ac.jp/crid/1390282679484546432,https://doi.org/10.1252/kakoronbunshu.17.1175