Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Yamaguchi Yukio and Konno Shinji and Muramatu Kazutami and Makabe Toshiaki,An analysis of substrate heating during a-Si:H deposition using concentric cylindrical DC glow discharge.,KAGAKU KOGAKU RONBUNSHU,0386216X,"The Society of Chemical Engineers, Japan",1990,16,3,605-613,https://cir.nii.ac.jp/crid/1390282679486609024,https://doi.org/10.1252/kakoronbunshu.16.605