Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Mori Nobuhiko and Egashira Yasuyuki and Ueyama Korekazu,Kinetic Study of CVD Reaction by Area-Controlled CVD.,JOURNAL OF CHEMICAL ENGINEERING OF JAPAN,00219592,"The Society of Chemical Engineers, Japan",2000,33,1,32-40,https://cir.nii.ac.jp/crid/1390282679541699968,https://doi.org/10.1252/jcej.33.32