Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
EGAWA Takashi and ISHIKAWA Hiroyasu and UMENO Masayoshi,Dry etching of Gan,Oyo Buturi,0369-8009,The Japan Society of Applied Physics,2000,69,11,1337-1338,https://cir.nii.ac.jp/crid/1390282679573088512,https://doi.org/10.11470/oubutsu1932.69.1337