Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Takagi Shigeyuki and Onoue Seiji and Iyanagi Katumi,Practical 2-dimensional PIG-MCC model for CF<sub>4</sub> plasma discharge,IEEJ Transactions on Fundamentals and Materials,03854205,The Institute of Electrical Engineers of Japan,2001,121,5,414-421,https://cir.nii.ac.jp/crid/1390282679574569344,https://doi.org/10.1541/ieejfms1990.121.5_414