著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Ohtsu Yasunori,High-Density Radio-Frequency Plasma Sources Produced by Capacitive Discharge with Various Methods for Thin-Film Preparation,電気学会論文誌． Ａ,03854205,一般社団法人 電気学会,2010,130,10,865-870,https://cir.nii.ac.jp/crid/1390282679575611392,https://doi.org/10.1541/ieejfms.130.865